Problem when compile model

When I compile the model (contain > 700 model reference) using following command

myModel([], [], [], 'compile')

Compile process is terminal with this error

Setting environment for using Microsoft Visual Studio 2010 x64 tools.

Microsoft(R) Program Maintenance Utility Version 10.00.30319.01
Copyright (C) Microsoft Corporation.  All rights reserved.

### Compiling [Model Name].c
	cl   -c -DCRTAPI1=_cdecl -DCRTAPI2=_cdecl -nologo -GS -D_AMD64_=1 -DWIN64 -D_WIN64  -DWIN32 -D_WIN32 -W4 -D_WINNT -D_WIN32_WINNT=0x0500 -DNTDDI_VERSION=0x05000000 -D_WIN32_IE=0x0500 -DWINVER=0x0500  -D_MT -D_DLL -MD  -D_CRT_SECURE_NO_WARNINGS   /Od /Oy- /DNDEBUG -DMODEL=M1001_2A_2A_MWO_convert_accarea_opening -DNUMST=1 -DNCSTATES=0  -DMAT_FILE=0 -DINTEGER_CODE=0  -DONESTEPFCN=0 -DTERMFCN=1  -DHAVESTDIO -DMULTI_INSTANCE_CODE=0 -DMDL_REF_SIM_TGT=1   [Model Name].c
[Model Name].c
..\..\..\slprj\sim\_sharedutils\rtw_shared_utils.h(28) : fatal error C1083: include ファイルを開けません。'rtw_shared_utils.h~': No such file or directory
NMAKE : fatal error U1077: '"C:\Program Files (x86)\Microsoft Visual Studio 10.0\VC\BIN\amd64\cl.EXE"' : リターン コード '0x2'
Stop.
The make command returned an error of 2
'An_error_occurred_during_the_call_to_make' is not recognized as an internal or external command,
operable program or batch file.

### 次のモデルに対するビルド プロセス:'[Model Name]' はエラーのため中止されました。
Model Not Compiled Check all inputs

Problem is automate generated file rtw_shared_utils.h

#ifndef RTW_HEADER_rtw_shared_utils_h_
#define RTW_HEADER_rtw_shared_utils_h_
#ifndef rtw_shared_utils_h_
# define rtw_shared_utils_h_

/* Shared utilities general include header file.*/
#include "BINARYSEARCH_real32_T.h"
#include "Look2D_real32_T_real32_T_real32_T.h"
#include "Look2D_real32_T_real32_T_real32_T_SAT.h"
#include "LookUpEven_real32_T_real32_T_SAT.h"
#include "LookUp_real32_T_real32_T_SAT.h"
#include "look1_iflf_binlcapw.h"
#include "look2_iflf_binlcapw.h"
#include "look2_iu8lftf_binlcapw.h"
#include "rtGetInf.h"
#include "rtGetNaN.h"
#include "rt_nonfinite.h"
#include "rtwtypes.h"
#include "rtw_shared_utils.h~"
#endif                                 /* rtw_shared_utils_h_ */
#endif                                 /* RTW_HEADER_rtw_shared_utils_h_ */

It included ifseft with "~" symbol.

#include "rtw_shared_utils.h~"

The model that is errored in compile process is totally random (I don't understand why)

Please show me the way how to fix it